Airborne Molecular Contamination in Cleanrooms
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There has been an increasing demand for higher performance goods with precision engineering, quality of sub-components and silicon-based materials. However, the presence of semi-volatile organic compounds (SVOCs), known as airborne molecular contaminants (AMCs), can negatively affect the performance of these components. Challenging AMCs includes antioxidants, plasticizers (such as phthalates), amines and amides, siloxanes, flame retardants, and organophosphates.
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EUROFINS STATS uses advanced instrumentations to measure airborne molecular contamination such as:
- ATD/GC/MS
- GC/MS/NPD/FID
- Ion Chromatography
- ICP/MS
One of the main sources of AMCs is outgassing from materials including:
- Computer components used in cleanroom
- Cleanroom construction products used in the cleanroom, including plastics
- Cleanroom particulate air filters
- Cleanroom consumables such as tape, garments, gloves, and cleaning materials
- People
As AMCs are in vapor form they, are able pass through most standard particulate air filters, leading to their presence in the cleanroom environment. Thus, it is important for technology industries to monitor cleanroom air for SVOCs as well as reduce emissions from all materials and products used in cleanrooms.
Our Capability:
- Outgassing test of cleanroom materials using ATD/GC/MS
- Ionic (Cation and Anion) contamination of materials using Ion-Chromatography
- Metallic contamination of materials using ICP/MS
- Elemental characterization of particles using SEM/EDX
- VOC emissions of materials
- Characterization of Microbiological contaminants of materials